Study the Effect of Etching Current Time on Porous Silicon Preparation
Keywords:
Porous Silicon, Photoelectrochemical Etching, Etching Current Density, XRD Characterization, Nanopore Morphology
Abstract
This study aims to investigate the effect of etching current time on the preparation of porous silicon using the photoelectrochemical etching method. N-type silicon (111) with a resistivity of 1.5-4 Ω.cm was used to prepare the porous silicon layers. The etching process was carried out using a solution of hydrofluoric acid (HF) with a concentration of 18% mixed with high-purity ethanol. The etching current densities were varied at 10, 15, 20, and 30 mA/cm² with an etching time of 15 minutes. The structural and morphological characterization of the porous silicon layers was performed using X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), and Atomic Force Microscopy (AFM). The XRD results showed a broad diffraction peak as the crystal size decreased to the nanometer scale. SEM and AFM images revealed that the porous silicon layer had a sponge-like structure, with pore sizes increasing as the etching current density increased.
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References
1. Akinyele, Daniel, Elijah Olabode, and Abraham Amole. "Review of fuel cell technologies and applications for sustainable microgrid systems." Inventions 5, no. 3 (2020): 42.
2. Bisi, O., Ossicini, S., & Pavesi, L. (2000). "Porous silicon: A quantum sponge structure for silicon based optoelectronics." Surface Science Reports, 38(1-3), 1-126.
3. Bisi, Olmes, Stefano Ossicini, and Lorenzo Pavesi. "Porous silicon: a quantum sponge structure for silicon based optoelectronics." Surface science reports 38, no. 1-3 (2000): 1- 126.
4. Canham, L. T. (1990). "Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers." Applied Physics Letters, 57(10), 1046-1048.
5. Chang, Jin, and Eric R. Waclawik. "Colloidal semiconductor nanocrystals: controlled synthesis and surface chemistry in organic media." RSC Advances 4, no. 45 (2014): 23505-23527.
6. Chen, Tupei, and Yang Liu. Semiconductor Nanocrystals and Metal Nanoparticles: Physical Properties and Device Applications. CRC Press, 2016.
7. Collins, Reuben T., and Philippe M. Fauchet. "Porous silicon: From luminescence to LEDs." Physics Today 50, no. 1 (1997): 24-31.
8. Cullis, A. G., Canham, L. T., & Calcott, P. D. J. (1997). "The structural and luminescence properties of porous silicon." Journal of Applied Physics, 82(3), 909-965.
9. de Mello Donegá, Celso, ed. Nanoparticles: workhorses of nanoscience. Springer, 2014.
10. Dwivedi, Priyanka, Saakshi Dhanekar, and Samaresh Das. "Selective acetone electrical detection using functionalized nano-porous silicon." In 2015 Annual IEEE India Conference (INDICON), pp. 1-4. IEEE, 2015.
11. Kassa T. T. ,SiliconNanostrucres,M.ScThesis, Addis Ababa University, Ethiopia (2006).
12. Kumeria, T., & Santos, A. (2018). "Porous silicon for therapeutic applications: Recent advances and future perspectives." Expert Opinion on Drug Delivery, 15(5), 487-499.
13. Liu, Yucheng, Yunxia Zhang, Xuejie Zhu, Zhou Yang, Weijun Ke, Jiangshan Feng, Xiaodong Ren et al. "Inch-sized high-quality perovskite single crystals by suppressing phase segregation for light-powered integrated circuits." Science Advances 7, no. 7 (2021): eabc8844.
14. McAllisterMJ, LiJL, and H. AdamsonD. "Singlesheetfunctionalizedgraphenebyoxidationandthermalexpansionofgraphite." Chem Mater 19 (2007): 4396-4404.
15. Mohammed, Ameer Hussein, and H. A. R. Akkar. "Design and Implementation of Artificial Neural Network for Mobile Robot based on FPGA." University of Technology (2015).
16. Padidar, M., A. Jalalian, M. Abdouss, P. Najafi, N. Honarjoo, and J. Fallahzade. "Effets of nanoclay on some physical properties of sandy soil and wind erosion." International Journal of Soil Science 11, no. 1 (2016): 9-13.
17. Prabhu, R. R., & Seshadri, M. (2010). "Porous silicon as a biomaterial for applications in drug delivery, tissue engineering and biosensing: A review." Sensors and Actuators B: Chemical, 155(1), 155-168.
18. Praveenkumar, S., D. Lingaraja, P. Mahiz Mathi, and G. Dinesh Ram. "An experimental study of optoelectronic properties of porous silicon for solar cell application." Optik 178 (2019): 216-223.
19. Sahu SN, Nada KK. NanoStructure Semiconductors: Physics and Applications. Institute of Physics in India.;Vol.67(1):PP.103-130 (2001).
20. Sailor, M. J., & Link, J. R. (2005). "Smart dust: Nanostructured devices in a grain of sand." Chemical Communications, 11, 1375-1383.
21. Salonen, J., & Lehto, V. P. (2008). "Fabrication and chemical surface modification of mesoporous silicon for biomedical applications." Chemical Engineering Journal, 137(1), 162-172.
22. Shabir, Qurrat, A. Pokale, Armando Loni, D. R. Johnson, L. T. Canham, Roberto Fenollosa, M. Tymczenko et al. "Medically biodegradable hydrogenated amorphous silicon microspheres." Silicon 3, no. 4 (2011): 173-176.
23. Sun, Wentong, Yu Han, Zhenhua Li, Kun Ge, and Jinchao Zhang. "Bone-targeted mesoporous silica nanocarrier anchored by zoledronate for cancer bone metastasis." Langmuir 32, no. 36 (2016): 9237-9244.
24. Torres-Costa, V., & Martín-Palma, R. J. (2010). "Applications of porous silicon in optoelectronics, microelectronics, and energy technologies." Materials, 3(4), 3052-3085.
25. Wang, P. C., & Ni, S. B. (2015). "Recent advances in porous silicon–metal oxide nanocomposites: Synthesis and applications in energy storage." Journal of Power Sources, 282, 230-239.
26. Zhao, J., & Song, K. (2016). "Advances in porous silicon research for biomedical applications." Journal of Biomedical Nanotechnology, 12(1), 1-16.
2. Bisi, O., Ossicini, S., & Pavesi, L. (2000). "Porous silicon: A quantum sponge structure for silicon based optoelectronics." Surface Science Reports, 38(1-3), 1-126.
3. Bisi, Olmes, Stefano Ossicini, and Lorenzo Pavesi. "Porous silicon: a quantum sponge structure for silicon based optoelectronics." Surface science reports 38, no. 1-3 (2000): 1- 126.
4. Canham, L. T. (1990). "Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers." Applied Physics Letters, 57(10), 1046-1048.
5. Chang, Jin, and Eric R. Waclawik. "Colloidal semiconductor nanocrystals: controlled synthesis and surface chemistry in organic media." RSC Advances 4, no. 45 (2014): 23505-23527.
6. Chen, Tupei, and Yang Liu. Semiconductor Nanocrystals and Metal Nanoparticles: Physical Properties and Device Applications. CRC Press, 2016.
7. Collins, Reuben T., and Philippe M. Fauchet. "Porous silicon: From luminescence to LEDs." Physics Today 50, no. 1 (1997): 24-31.
8. Cullis, A. G., Canham, L. T., & Calcott, P. D. J. (1997). "The structural and luminescence properties of porous silicon." Journal of Applied Physics, 82(3), 909-965.
9. de Mello Donegá, Celso, ed. Nanoparticles: workhorses of nanoscience. Springer, 2014.
10. Dwivedi, Priyanka, Saakshi Dhanekar, and Samaresh Das. "Selective acetone electrical detection using functionalized nano-porous silicon." In 2015 Annual IEEE India Conference (INDICON), pp. 1-4. IEEE, 2015.
11. Kassa T. T. ,SiliconNanostrucres,M.ScThesis, Addis Ababa University, Ethiopia (2006).
12. Kumeria, T., & Santos, A. (2018). "Porous silicon for therapeutic applications: Recent advances and future perspectives." Expert Opinion on Drug Delivery, 15(5), 487-499.
13. Liu, Yucheng, Yunxia Zhang, Xuejie Zhu, Zhou Yang, Weijun Ke, Jiangshan Feng, Xiaodong Ren et al. "Inch-sized high-quality perovskite single crystals by suppressing phase segregation for light-powered integrated circuits." Science Advances 7, no. 7 (2021): eabc8844.
14. McAllisterMJ, LiJL, and H. AdamsonD. "Singlesheetfunctionalizedgraphenebyoxidationandthermalexpansionofgraphite." Chem Mater 19 (2007): 4396-4404.
15. Mohammed, Ameer Hussein, and H. A. R. Akkar. "Design and Implementation of Artificial Neural Network for Mobile Robot based on FPGA." University of Technology (2015).
16. Padidar, M., A. Jalalian, M. Abdouss, P. Najafi, N. Honarjoo, and J. Fallahzade. "Effets of nanoclay on some physical properties of sandy soil and wind erosion." International Journal of Soil Science 11, no. 1 (2016): 9-13.
17. Prabhu, R. R., & Seshadri, M. (2010). "Porous silicon as a biomaterial for applications in drug delivery, tissue engineering and biosensing: A review." Sensors and Actuators B: Chemical, 155(1), 155-168.
18. Praveenkumar, S., D. Lingaraja, P. Mahiz Mathi, and G. Dinesh Ram. "An experimental study of optoelectronic properties of porous silicon for solar cell application." Optik 178 (2019): 216-223.
19. Sahu SN, Nada KK. NanoStructure Semiconductors: Physics and Applications. Institute of Physics in India.;Vol.67(1):PP.103-130 (2001).
20. Sailor, M. J., & Link, J. R. (2005). "Smart dust: Nanostructured devices in a grain of sand." Chemical Communications, 11, 1375-1383.
21. Salonen, J., & Lehto, V. P. (2008). "Fabrication and chemical surface modification of mesoporous silicon for biomedical applications." Chemical Engineering Journal, 137(1), 162-172.
22. Shabir, Qurrat, A. Pokale, Armando Loni, D. R. Johnson, L. T. Canham, Roberto Fenollosa, M. Tymczenko et al. "Medically biodegradable hydrogenated amorphous silicon microspheres." Silicon 3, no. 4 (2011): 173-176.
23. Sun, Wentong, Yu Han, Zhenhua Li, Kun Ge, and Jinchao Zhang. "Bone-targeted mesoporous silica nanocarrier anchored by zoledronate for cancer bone metastasis." Langmuir 32, no. 36 (2016): 9237-9244.
24. Torres-Costa, V., & Martín-Palma, R. J. (2010). "Applications of porous silicon in optoelectronics, microelectronics, and energy technologies." Materials, 3(4), 3052-3085.
25. Wang, P. C., & Ni, S. B. (2015). "Recent advances in porous silicon–metal oxide nanocomposites: Synthesis and applications in energy storage." Journal of Power Sources, 282, 230-239.
26. Zhao, J., & Song, K. (2016). "Advances in porous silicon research for biomedical applications." Journal of Biomedical Nanotechnology, 12(1), 1-16.
Published
2024-07-31
How to Cite
Saud, S. J., Shaker, D. A., Hammed, T. Q., & Hussein, H. T. (2024). Study the Effect of Etching Current Time on Porous Silicon Preparation. Central Asian Journal of Theoretical and Applied Science, 5(4), 445-454. Retrieved from https://cajotas.centralasianstudies.org/index.php/CAJOTAS/article/view/1494
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